Publication:
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
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1998 since deposited on 2021-10-20
3last month
Acq. date: 2026-06-02
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Statistics
Views
1998 since deposited on 2021-10-20
3last month
Acq. date: 2026-06-02
Citations