Publication:

Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Date

2010
Journal article
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Author(s)

Clarysse, Trudo
;
Moussa, Alain  
;
Parmentier, Brigitte  
;
Bogdanowicz, Janusz  
;
Vandervorst, Wilfried  
;
Bender, Hugo  
;
Pfeffer, Markus
;
Schellenberger, Martin
;
Nielsen, Peter
;
Thorsteinsson, Sune
;
Lin, Rong
;
Petersen, Dirch

Journal

Journal of Vacuum Science and Technology B

Abstract

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