Publication:
Buried Power Rails and Nano-Scale TSV: Technology Boosters for Backside Power Delivery Network and 3D Heterogeneous Integration
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1924 since deposited on 2022-09-17
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Acq. date: 2026-10-13
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Views
1924 since deposited on 2022-09-17
22last month
4last week
Acq. date: 2026-10-13
Citations