Publication:

Multi-Vt Gate Stack Technologies for Nanosheet and CFET Devices

Date

2024
Proceedings Paper
https://doi.org/10.1109/snw63608.2024.10639201
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Author(s)

Arimura, Hiroaki  
;
Franco, Jacopo  
;
Ragnarsson, Lars-Ake  
;
Vandooren, Anne  
;
Brus, Stephan  
;
Maqsood, W.
;
Conard, Thierry  
;
Verni, G. Alessio
;
Maes, J. W.
;
Kannan, B.
;
Givens, M.
;
Horiguchi, Naoto  

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387 since deposited on 2024-10-27
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Acq. date: 2026-08-17

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