Publication:

Study of EUV stochastic defect on wafer yield

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010858
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Published version 1.34 MB

Author(s)

Tsai, Yi-Pei
;
Chang, Chieh-Miao
;
Chang, Yi-Han
;
Oak, Apoorva  
;
Trivkovic, Darko  
;
Kim, Ryan Ryoung han

Journal

Proceedings of SPIE

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1471 since deposited on 2024-06-15
85last month
27last week
Acq. date: 2026-10-13

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695 since deposited on 2024-06-15
4last month
3last week
Acq. date: 2026-10-13

Citations