A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring

Publication:

2012

Journal article

Author(s)

Samara, Vladimir

;

Booth, Jean-Paul

;

;

;

Brouri, Mohand

;

Plasma Sources Science and Technology

1983 since deposited on 2021-10-20

Acq. date: 2026-10-12