Publication:

Molecular glass resists for scanning probe lithography

Date

2014

Proceedings Paper

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Files

27914.pdf 4.9 MB

Author(s)

Neuber, Christian

;

;

;

Wieberger, Floryan

;

Strohriegl, Peter

;

Schimdt, Hans-Werner

;

Fokkema, Vincent

;

;

Rawlings, Colin

;

;

;

de Marneffe, Jean-Francois

;

De Schepper, Peter

;

Kaestner, Marcus

;

Krivoshapkina, Yana

;

Budden, Matthias

;

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