Publication:
Impact of TiN metal gate thickness and the HfSiO nitridation on MuGFETs electrical performance
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1844 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-19
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Statistics
Views
1844 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-19
Citations