Publication:
Integrating high-k dielectrics: etched polysilicon or metal gates?
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1986 since deposited on 2021-10-15
5last month
1last week
Acq. date: 2026-08-21
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Statistics
Views
1986 since deposited on 2021-10-15
5last month
1last week
Acq. date: 2026-08-21
Citations