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Correlation between stress-induced leakage current (SILC) and the HfO2 bulk trap density in a SiO2/HfO2 stack

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2030 since deposited on 2021-10-15
5last month
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Acq. date: 2026-10-13

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2030 since deposited on 2021-10-15
5last month
2last week
Acq. date: 2026-10-13

Citations