Publication:

Freeform illumination sources: Source mask optimization for 22 nm node SRAM

Date

2009
Proceedings Paper
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Author(s)

Bekaert, Joost  
;
Laenens, Bart
;
Verhaegen, Staf
;
Van Look, Lieve  
;
Trivkovic, Darko  
;
Lazzarino, Frederic  
;
Vandenberghe, Geert  
;
Van Adrichem, Paul  
;
Socha, Robert
;
Mulder, M.
;
Baron, Stanislas
;
Tsai, Min-Chun
;
Ning, Kai
;
Hsu, Stephen
;
Bouma, A.
;
van der Heijden, E.
;
Schreel, Koen
;
Carpaij, R.
;
Dusa, Mircea  
;
Zimmerman, Joerg
;
Graeupner, Paul
;
Hennerkes, Christoph

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