Publication:

Extending logic metal printing with sub-resolution grating in high and hyper NA EUV lithography

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3051144
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Author(s)

Lee, Inhwan  
;
Franke, Joern-Holger  
;
Philipsen, Vicky  
;
Ronse, Kurt  
;
De Gendt, Stefan  
;
Hendrickx, Eric  

Journal

Proceedings of SPIE

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50 since deposited on 2025-07-31
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