Publication:

Superior N- and PMOSFET scalability using carbon co-implantation and spike annealing

Date

2007

Journal article

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Author(s)

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;

Kubicek, Stefan

;

Hoffmann, Thomas

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Chiarella, Thomas

;

Kerner, Christoph

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Falepin, Annelies

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De Keersgieter, An

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;

Vanhaeren, Danielle

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Vandervorst, Wilfried

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;

Absil, Philippe

;

Biesemans, Serge

Journal

Solid-State Electronics

Statistics

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