Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration Applications

Rimbock, Johanna; Ertl, Stefan; Ramaswamy, Prasanna; Farrell, Alex; Uzun, Ali; Pires, Mariana; Corbett, Brain; Loi, Ruggero; Varga, Ksenija; Ossieur, Peter

doi:10.1109/ESTC60143.2024.10712128

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Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration Applications

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2024

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https://doi.org/10.1109/ESTC60143.2024.10712128

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1 since deposited on 2025-02-15

Acq. date: 2026-06-05

240 since deposited on 2025-02-15

Acq. date: 2026-06-05

Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration Applications

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