Publication:

Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

Date

2015
Journal article
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Author(s)

Zhang, Liping  
;
de Marneffe, Jean-Francois  
;
Heyne, Markus
;
Naumov, Sergej
;
Sun, Yiting  
;
Zotovich, Alexey
;
El Otell, Ziad  
;
Vaida, Selim
;
De Gendt, Stefan  
;
Baklanov, Mikhaïl

Journal

ECS Journal of Solid State Science and Technology

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