Publication:
The importance of moisture control for EOT scaling of Hf-based dielectrics
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1934 since deposited on 2021-10-18
4last month
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Acq. date: 2026-08-15
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Statistics
Views
1934 since deposited on 2021-10-18
4last month
1last week
Acq. date: 2026-08-15
Citations