Publication:

Etching of Co-Pd with significantly reduced sidewall re-deposition

Date

2013

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

;

Nishimura, Eiichi

;

Kushibiki, Masato

;

Wataru, Shimizu

;

Tahara, Shigeru

;

;

;

Boullart, Werner

Statistics

1945 since deposited on 2021-10-21

2last month

Acq. date: 2026-10-13