Publication:
Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications
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1893 since deposited on 2021-10-16
3last month
Acq. date: 2026-08-18
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Statistics
Views
1893 since deposited on 2021-10-16
3last month
Acq. date: 2026-08-18
Citations