Publication:
Comparative stochastic process variation bands for N7, N5, and N3 at EUV
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1919 since deposited on 2021-10-26
3last month
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Acq. date: 2026-08-17
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Statistics
Views
1919 since deposited on 2021-10-26
3last month
2last week
Acq. date: 2026-08-17
Citations