Publication:

Observation and characterization of defects in HfO2 high-k gate dielectric layers

Date

2005

Journal article

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Author(s)

;

;

Delabie, Annelies

;

Van Elshocht, Sven

;

Richard, Olivier

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;

Witters, Thomas

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;

De Gendt, Stefan

;

Journal

Microelectronics Reliability

Statistics

1984 since deposited on 2021-10-16

Acq. date: 2026-05-30