Publication:
Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics
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2069 since deposited on 2021-10-27
4last month
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Acq. date: 2026-08-16
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Statistics
Views
2069 since deposited on 2021-10-27
4last month
1last week
Acq. date: 2026-08-16
Citations