Publication:

Implementing cubic-phase HfO2 with $j-value ~ 30 in low-VT replacementgate pMOS devices for improved EOT-Scaling and reliability

Date

Loading...
Thumbnail Image

Abstract

Description

Statistics

Views

1881 since deposited on 2021-10-20
2last month
Acq. date: 2026-06-02

Citations

Statistics

Views

1881 since deposited on 2021-10-20
2last month
Acq. date: 2026-06-02

Citations