Publication:

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Date

2025
Journal article
https://doi.org/10.1002/admi.202400558
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 2.63 MB

Author(s)

Erofeev, Ivan
;
Hartanto, Antony Winata
;
Khan, Muhaimin Mareum
;
Deng, Kerong
;
Kumar, Krishna
;
Aabdin, Zainul
;
Tjiu, Weng Weei
;
Zhang, Mingsheng
;
Pacco, Antoine  
;
Philipsen, Harold  
;
Chowdhuri, Angshuman Ray
;
Huynh, Han Vinh
;
Holsteyns, Frank  
;
Mirsaidov, Utkur

Journal

ADVANCED MATERIALS INTERFACES

Abstract

Description

Statistics

Downloads

689 since deposited on 2024-11-26
116last month
43last week
Acq. date: 2026-10-13

Views

297 since deposited on 2024-11-26
22last month
6last week
Acq. date: 2026-10-13

Citations

Statistics

Downloads

689 since deposited on 2024-11-26
116last month
43last week
Acq. date: 2026-10-13

Views

297 since deposited on 2024-11-26
22last month
6last week
Acq. date: 2026-10-13

Citations