Publication:
Kinetic Monte Carlo simulations for dopant diffusion and defects in Si and SiGe
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1926 since deposited on 2021-10-21
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Acq. date: 2026-08-20
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Statistics
Views
1926 since deposited on 2021-10-21
1last month
1last week
Acq. date: 2026-08-20
Citations