Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions

Publication:

2019

Journal article

Author(s)

;

Mouwen, Nils

;

Teck, Sander

;

Monnens, Wouter

;

;

;

Electrochimica Acta

2012 since deposited on 2021-10-27

3last month

Acq. date: 2026-06-02