Publication:
Finite element modeling of PAG leaching and water uptake in immersion lithography resist materials
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1989 since deposited on 2021-10-17
7last month
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Acq. date: 2026-08-22
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Statistics
Views
1989 since deposited on 2021-10-17
7last month
1last week
Acq. date: 2026-08-22
Citations