Publication:

Cleaning and strip requirement for metal gate based CMOS integration

Date

2009
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Author(s)

Schram, Tom  
;
Sebaai, Farid  
;
Claes, Martine  
;
Vos, Rita  
;
Wada, Masayuli
;
Rohr, Erika
;
Kubicek, Stefan  

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1969 since deposited on 2021-10-18
Acq. date: 2026-05-29

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1969 since deposited on 2021-10-18
Acq. date: 2026-05-29

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