Browsing by Author "Sarkar, T."
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Publication Addressing Integration Challenges in Direct Backside Contact of CFET
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02Publication Addressing Integration Challenges in Direct Backside Contact of CFET
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02Publication Dry Etch Challenges for Patterning Middle-of-line (MOL) Contact Trench in Monolithic CFET (complementary FET)
Proceedings paper2024, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XIII, 2024-02-25, p.129590BPublication Monolithic-CFET with Direct Backside Contact to Source/Drain and Backside Dielectric Isolation
Proceedings paper2024, IEEE International Electron Devices Meeting (IEDM), 2024-12-07