Browsing by Author "Goedbloed, Martijn"
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Publication A batch process micromachined thermoelectric energy harvester: fabrication and characterization
Journal article2010, Journal of Micromechanics and Microengineering, (20) 10, p.104005Publication A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
Proceedings paper2013, Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, 16/06/2013, p.693-696Publication A new gap-closing electrostatic vibrational energy harvester employing electrodes vertically integrated with a seismic mass
Publication Anodic dissolution for etching large length-to-height ratio microfluidic channels
Proceedings paper2010, 12th International Conference on New Actuators and 6th International Exhibition on Smart Actuators and Drive Systems - ACTUATOR, 14/06/2010Publication Charge injection and storage in single-layer and multilayer electrets based on SiO2 and Si3N4
Journal article2012, IEEE Transactions on Dielectrics and Electrical Insulation, (19) 4, p.1253-1260Publication Comparison of positively and negatively charged layered inorganic electrets for high operational temperatures
Proceedings paper2011, 14th International Symposium on Electrets, 28/08/2011, p.43-44Publication Design improvements for an electret-based MEMS vibrational electrostatic energy harvester
Proceedings paper2013, Proceedings 13th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS, 3/12/2013, p.12078Publication Design, fabrication and characterization of electrostatic micro actuators for microfluidic platforms
Publication Effect of built-in stress level of piezoelectric AlN thin films on the properties of vibrational energy harvesters
Publication Effect of length/width ratio of tapered beams on performance of piezo electric energy harvesters
Publication Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting
Publication Electret patterning technologies for microsystems
Proceedings paper2010, Smart Systems Integration: 4th European Conference on Integration Issues of Miniaturized Systems, 23/03/2010, p.35Publication Electrostatically driven microfluidic actuators for autonomous applications
Proceedings paper2010, 12th International Conference on New Actuators and 6th International Exhibition on Smart Actuators and Drive Systems - ACTUATOR, 14/06/2010Publication Fine patterning of electrets for sensors and energy harvesters
Proceedings paper2012, IEEE Sensors Conference, 28/10/2012, p.1806-1809Publication First autonomous wireless sensor node powered by a vacuum-packaged piezoelectric MEMS energy harvester
Proceedings paper2009, IEEE International Electron Devices Meeting - IEDM, 7/12/2009, p.543-546Publication MEMS based mechanical energy harvesters
Oral presentation2010, 36th International Conference on Micro & Nano Engineering - MNEPublication MEMS-based aluminum nitride piezoelectric energy harvesting module
Proceedings paper2009, Smart Systems Integration, 10/03/2009Publication Micromachined thermoelectric energy harvester fabrication on 6-inch wafer and characterization
Proceedings paper2009, 9th PowerMEMS Workshop, 1/12/2009, p.157-160Publication Modeling and characterizaiton of MEMS-based piezoelectric harvesting devices
Journal article2010, Journal of Micromechanics and Microengineering, (20) 10, p.105023Publication Multilayer electrets for vibration energy harvesting at extremely high temperatures
Proceedings paper2011, 5th Smart Systems Integration Conference - SSI, 22/03/2011, p.Paper 21