The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation

Publication:

2007

Proceedings Paper

Author(s)

Travaly, Youssef

;

Sinapi, Fabrice

;

Heylen, Nancy

;

Humbert, Aurelie

;

Delande, Tinne

;

Caluwaerts, Rudy

;

Gueneau de Mussy, Jean Paul

;

Vereecke, Guy

;

Baklanov, Mikhaïl

;

Iacopi, Francesca

;

Hernandez, Jose Luis

;

Beyer, Gerald

;

Fischer, Pamela

1927 since deposited on 2021-10-16

2last month

Acq. date: 2026-10-12