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Browsing by Author "Vande Weeghde, J."

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    300mm fabrication of silicon quantum dot spin qubits using 0.33NA EUV lithography

    Beyne, Sofie  
    ;
    Kubicek, Stefan  
    ;
    Godfrin, Clement  
    ;
    Raes, Bart  
    ;
    Van Caekenberghe, T.
    Proceedings paper
    2025, IEEE International Electron Devices Meeting (IEDM), 2025-12-06

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