Browsing by Author "Shah, Asif A."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Revealing the Origins of Thermally Induced Anomaly in 18 nm Pitch Ruthenium Nanointerconnects on 300 mm Wafers
Journal article2026, ACS APPLIED MATERIALS & INTERFACES, (18) 14, p.20763-20776Publication Thermally-Induced Morphology Changes in Subtractive Ru Lines and Their Mitigation
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02