Browsing by Author "Ramachandran, Praniesh Ayyanar"
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Publication Depth-of-Focus enhancement in High-Numerical Aperture EUV lithography by source and mask optimization
Proceedings paper2025, PHOTOMASK TECHNOLOGY 2025, 2025-09-22, p.136870PPublication Depth-of-focus enhancement in high-numerical aperture EUV lithography by source and mask optimization
Journal article2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 2, p.021208-021208