Browsing by Author "Lievens, Peter"
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Publication Electron beam induced etching of silicon with SF6
Journal article2010, Journal of Vacuum Science and Technology B, (28) 6, p.1206-1209Publication Particle emission from chemically enhanced electron-beam-induced etching of Si: An approach for zero-energy secondary-ion mass spectrometry
Journal article2009, Physical Review B, (79) 3, p.35305Publication The integration of EBIE into a SIMS tool: towards quantitative depth profiles with high resolution and a better understanding of the etch mechanisms
Meeting abstract2008, FEBIP Workshop, 7/07/2008Publication Towards quantitative depth profiling with high spatial and high depth resolution
Journal article2008, Applied Surface Science, (255) 4, p.1360-1363Publication Unravelling the structure of broadband white-emitting silver nanoclusters stabilized in sulfur-doped zeolites
Publication Zero-energy SIMS depth profiling: the role of surface roughness development with XeF2 based etching
Journal article2011, Surface and Interface Analysis, (43) 1_2, p.159-162Publication Zero-energy SIMS: Towards quantitative depth profiling with high spatial and high depth resolution
Meeting abstract2008, SIMS Europe: 6th European Workshop on Secondary Ion Mass Spectrometry. Book of Abstracts, 14/09/2008, p.p115