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Browsing by Author "Koyano, Ryo"

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    Comparing bright field imaging performance at 0.33 NA of a novel low-reflectivity low-n and a standard Ta-based EUV mask

    Van Look, Lieve  
    ;
    Libeert, Guillaume  
    ;
    Pellens, Nick  
    ;
    Philipsen, Vicky  
    ;
    Hanekawa, Hiroshi
    Proceedings paper
    2025, 40th European Mask and Lithography Conference - EMLC, 2025-06-16, p.137870A

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