Browsing by Author "Kachel, Krzysztof"

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Sequential infiltration synthesis for line edge roughness mitigation of EUV resist

Baryshnikova, Marina
;
De Simone, Danilo
;
Chan, BT
;
Rincon Delgadillo, Paulina
Oral presentation
2017, 34th International Conference of Photopolymer Science and Technology
Sequential infiltration synthesis for line edge roughness mitigation of EUV resist

Baryshnikova, Marina
;
De Simone, Danilo
;
Knaepen, Werner
;
Kachel, Krzysztof
;
Chan, BT
Journal article
2017, Journal of Photopolymer Science and Technology, (30) 6, p.667-670