Browsing by Author "Abbasirad, Najmeh"
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Publication Effect of Thickness on the Optical Constants Determination of TiN Thin Films in the EUV/VUV Range
Publication Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124963BPublication Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124961M